Introduction to Vacuum Technology

• Main Authors: Hata, David M. (Author), Brewer, Elena V. (Author), Louwagie, Nancy J. (Author)
• Format: Electronic eBook
• Language: English
• Published: Geneseo, NY Milne Open Textbooks 2023.
• Series: Open textbook library.
• Subjects: Engineering and Technology > Textbooks; Electrical Engineering > Textbooks
• Online Access: Access online version

Vacuum systems are critical to many industries. They are vital to establishing required process pressures, establishing a clean process environment, and removing reaction by-products from the process chamber. This text, a revision and expansion of David Hata’s Introduction to Vacuum Technology publi...