Introduction to Vacuum Technology

• Hoofdauteurs: Hata, David M. (Auteur), Brewer, Elena V. (Auteur), Louwagie, Nancy J. (Auteur)
• Formaat: Elektronisch E-boek
• Taal: Engels
• Gepubliceerd in: Geneseo, NY Milne Open Textbooks 2023.
• Reeks: Open textbook library.
• Onderwerpen: Engineering and Technology > Textbooks; Electrical Engineering > Textbooks
• Online toegang: Access online version

Vacuum systems are critical to many industries. They are vital to establishing required process pressures, establishing a clean process environment, and removing reaction by-products from the process chamber. This text, a revision and expansion of David Hata’s Introduction to Vacuum Technology publi...