Introduction to Vacuum Technology
Vacuum systems are critical to many industries. They are vital to establishing required process pressures, establishing a clean process environment, and removing reaction by-products from the process chamber. This text, a revision and expansion of David Hata’s Introduction to Vacuum Technology publi...
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Main Authors: | Hata, David M. (Author), Brewer, Elena V. (Author), Louwagie, Nancy J. (Author) |
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Format: | Electronic eBook |
Language: | English |
Published: |
Geneseo, NY
Milne Open Textbooks
2023.
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Series: | Open textbook library.
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Subjects: | |
Online Access: | Access online version |
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