Introduction to Vacuum Technology
Vacuum systems are critical to many industries. They are vital to establishing required process pressures, establishing a clean process environment, and removing reaction by-products from the process chamber. This text, a revision and expansion of David Hata’s Introduction to Vacuum Technology publi...
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| Main Authors: | , , |
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
Geneseo, NY
Milne Open Textbooks
2023.
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| Series: | Open textbook library.
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| Subjects: | |
| Online Access: | Access online version |
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