Introduction to Vacuum Technology

Introduction to Vacuum Technology

Vacuum systems are critical to many industries. They are vital to establishing required process pressures, establishing a clean process environment, and removing reaction by-products from the process chamber. This text, a revision and expansion of David Hata’s Introduction to Vacuum Technology publi...

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Bibliographic Details
Main Authors: Hata, David M. (Author), Brewer, Elena V. (Author), Louwagie, Nancy J. (Author)
Format: Electronic eBook
Language:English
Published: Geneseo, NY Milne Open Textbooks 2023.
Series:Open textbook library.
Subjects:
Engineering and Technology > Textbooks
Electrical Engineering > Textbooks
Online Access:Access online version
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Table of Contents:
  • About This Book
  • About The Authors
  • Industry Testimonials
  • Acknowledgements
  • Chapter 1: Vacuum: An Enabling Technology
  • Chapter 2: The Behavior of Gases
  • Chapter 3: An Introduction to Vacuum Systems
  • Chapter 4: Rough Vacuum Regime
  • Glossary
  • Index

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