Chemical Vapor Deposition Recent Advances and Applications in Optical, Solar Cells and Solid State Devices
This book provides an overview of chemical vapor deposition (CVD) methods and recent advances in developing novel materials for application in various fields. CVD has now evolved into the most widely used technique for growth of thin films in electronics industry. Several books on CVD methods have e...
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| Format: | Electronic Book Chapter |
| Language: | English |
| Published: |
IntechOpen
2016
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| Subjects: | |
| Online Access: | DOAB: download the publication DOAB: description of the publication |
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| Summary: | This book provides an overview of chemical vapor deposition (CVD) methods and recent advances in developing novel materials for application in various fields. CVD has now evolved into the most widely used technique for growth of thin films in electronics industry. Several books on CVD methods have emerged in the past, and thus the scope of this book goes beyond providing fundamentals of the CVD process. Some of the chapters included highlight current limitations in the CVD methods and offer alternatives in developing coatings through overcoming these limitations. |
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| Physical Description: | 1 electronic resource (290 p.) |
| ISBN: | 61559 9789535125730 9789535125723 9789535141877 |
| Access: | Open Access |