3D Printing of MEMS Technology

• Other Authors: Ehrmann, Andrea (Editor)
• Format: Electronic Book Chapter
• Language: English
• Published: Basel MDPI - Multidisciplinary Digital Publishing Institute 2023
• Subjects: Technology: general issues; History of engineering & technology; Materials science; 3D printing; microelectromechanical systems (MEMS); microelectronics; microfluidics; microsensors; microactuators; inkjet printing; zinc oxide; heat treatment; micro-heater; semiconductor; 2D printhead; thermal inkjet; thin-film resistors; digital light processing; projection micro-stereolithography; micro beam; fabrication; additive manufacturing technology; powder bed fusion; surface geometrical parameters (SGP); lathe chuck jaws; polymethylmethacrylate; additive manufacturing; fused deposition modeling; passive; pipeline; pressure; reactive impedance sensor; structural health monitoring; wireless; DNA printing; flow estimation; MEMS; ferrite materials; magnetic thin films; strontium ferrite nanomaterial; relative permeability; relative permittivity; thermopneumatic; micro actuator; soft bellows actuator; independent actuation; polydimethylsiloxane; standalone; aerosol jet printing; dielectric; etching; polyvinyl alcohol (PVA), polymers; sacrificial material; micro-electro-mechanical-system (MEMS); lithium niobate microring resonator; silicon nitride waveguide; photolithography assisted chemo-mechanical etching; colorimetric device; organophosphorus pesticide residues; LCD mask photo-curing; PolyJet 3D printing; fidelity of 3D printing; n/a
• Online Access: DOAB: download the publication; DOAB: description of the publication

Three-dimensional printing is among the emerging technologies of our time. While it was previously primarily employed for rapid prototyping, this technology has entered a phase of accelerated production, especially for complicated or small objects. Most recently, novel 3D printing technologies have enabled objects with features at the micro- or even nano-scale to be fabricated. Meanwhile, well-known problems such as the waviness of fused deposition modeling (FDM)-printed parts, the missing long-term stability of some typical printing materials or the reduced mechanical properties of 3D-printed objects persist.This Special Issue focusses on all topics related to the 3D printing of micro-electro-mechanical systems (MEMS), such as novel or advanced features enabled by 3D printing compared to conventional technologies, but also the challenges that continue to exist regarding the application of 3D printing technologies for MEMS and new approaches to overcoming them.