3D Printing of MEMS Technology

• Other Authors: Ehrmann, Andrea (Editor)
• Format: Electronic Book Chapter
• Language: English
• Published: Basel MDPI - Multidisciplinary Digital Publishing Institute 2023
• Subjects: Technology: general issues; History of engineering & technology; Materials science; 3D printing; microelectromechanical systems (MEMS); microelectronics; microfluidics; microsensors; microactuators; inkjet printing; zinc oxide; heat treatment; micro-heater; semiconductor; 2D printhead; thermal inkjet; thin-film resistors; digital light processing; projection micro-stereolithography; micro beam; fabrication; additive manufacturing technology; powder bed fusion; surface geometrical parameters (SGP); lathe chuck jaws; polymethylmethacrylate; additive manufacturing; fused deposition modeling; passive; pipeline; pressure; reactive impedance sensor; structural health monitoring; wireless; DNA printing; flow estimation; MEMS; ferrite materials; magnetic thin films; strontium ferrite nanomaterial; relative permeability; relative permittivity; thermopneumatic; micro actuator; soft bellows actuator; independent actuation; polydimethylsiloxane; standalone; aerosol jet printing; dielectric; etching; polyvinyl alcohol (PVA), polymers; sacrificial material; micro-electro-mechanical-system (MEMS); lithium niobate microring resonator; silicon nitride waveguide; photolithography assisted chemo-mechanical etching; colorimetric device; organophosphorus pesticide residues; LCD mask photo-curing; PolyJet 3D printing; fidelity of 3D printing; n/a
• Online Access: DOAB: download the publication; DOAB: description of the publication

Three-dimensional printing is among the emerging technologies of our time. While it was previously primarily employed for rapid prototyping, this technology has entered a phase of accelerated production, especially for complicated or small objects. Most recently, novel 3D printing technologies have...