Nanoparticle Engineering for Chemical-Mechanical Planarization Fabrication of Next-Generation Nanodevices
Increasing reliance on electronic devices demands products with high performance and efficiency. Such devices can be realized through the advent of nanoparticle technology. This book explains the physicochemical properties of nanoparticles according to each step in the chemical mechanical planarizat...
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| Format: | Electronic Book Chapter |
| Language: | English |
| Published: |
Taylor & Francis
2009
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| Online Access: | DOAB: download the publication DOAB: description of the publication |
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