Nanoparticle Engineering for Chemical-Mechanical Planarization Fabrication of Next-Generation Nanodevices
Increasing reliance on electronic devices demands products with high performance and efficiency. Such devices can be realized through the advent of nanoparticle technology. This book explains the physicochemical properties of nanoparticles according to each step in the chemical mechanical planarizat...
Kaydedildi:
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| Diğer Yazarlar: | |
| Materyal Türü: | Elektronik Kitap Bölümü |
| Dil: | İngilizce |
| Baskı/Yayın Bilgisi: |
Taylor & Francis
2009
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| Konular: | |
| Online Erişim: | DOAB: download the publication DOAB: description of the publication |
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