Optical MEMS

• Main Author: Zamkotsian, Frederic (auth)
• Other Authors: Xie, Huikai (auth)
• Format: Electronic Book Chapter
• Language: English
• Published: MDPI - Multidisciplinary Digital Publishing Institute 2019
• Subjects: History of engineering & technology; stray light; input shaping; n/a; wavefront sensing; signal-to-noise ratio (SNR); LC micro-lenses controlled electrically; infrared; intraoperative microscope; MEMS mirror; MLSSP; ocular aberrations; MEMS scanning micromirror; electrothermal actuation; electrothermal bimorph; open-loop control; wavelength dependent loss (WDL); NIR fluorescence; infrared Fabry-Perot (FP) filtering; two-photon; resonant MEMS scanner; residual oscillation; 3D measurement; parametric resonance; digital micromirror device; quality map; metalens; flame retardant 4 (FR4); angle sensor; optical switch; metasurface; vibration noise; optical coherence tomography; spectrometer; reliability; quasistatic actuation; Huygens' metalens; confocal; large reflection variations; electrostatic; dual-mode liquid-crystal (LC) device; field of view (FOV); scanning micromirror; fluorescence confocal; variable optical attenuator (VOA); micro-electro-mechanical systems (MEMS); microscanner; laser stripe width; polarization dependent loss (PDL); fringe projection; 2D Lissajous; usable scan range; laser stripe scanning; bio-optical imaging; MEMS scanning mirror; digital micromirror device (DMD); Cu/W bimorph; echelle grating; achromatic; DMD chip; tunable fiber laser; programmable spectral filter; higher-order modes; electromagnetic actuator
• Online Access: DOAB: download the publication; DOAB: description of the publication

Optical microelectromechanical systems (MEMS), microoptoelectromechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micro- or millimeter scale. Optical MEMS have had enormous commercial success in projectors, displays,...