Prozessentwicklung eines industrietauglichen Verfahrens zur Fertigung von vereinzelten LIGA-Mikrobauteilen
This work deals with the development of an industry suited process aiming on the fabrication (based on the LIGA technique) of near net shape, single microparts. Those microparts should lead to new innovative ideas and thus to successful products on the market.
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| Format: | Electronic Book Chapter |
| Published: |
KIT Scientific Publishing
2015
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| Series: | Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie / Hrsg.: Institut für Mikrostrukturtechnik
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| Subjects: | |
| Online Access: | DOAB: download the publication DOAB: description of the publication |
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