X-ray optics made by X-ray lithography: Process optimization and quality control
Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample's microstructure without the need for ultrahigh spatial resolution. The technique relies on grating st...
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| Main Author: | |
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| Format: | Electronic Book Chapter |
| Language: | English |
| Published: |
KIT Scientific Publishing
2017
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| Series: | Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie / Hrsg.: Institut für Mikrostrukturtechnik
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| Subjects: | |
| Online Access: | DOAB: download the publication DOAB: description of the publication |
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| 020 | |a 9783731506799 | ||
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| 100 | 1 | |a Koch, Frieder Johannes |4 auth | |
| 245 | 1 | 0 | |a X-ray optics made by X-ray lithography: Process optimization and quality control |
| 260 | |b KIT Scientific Publishing |c 2017 | ||
| 300 | |a 1 electronic resource (X, 138 p. p.) | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 490 | 1 | |a Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie / Hrsg.: Institut für Mikrostrukturtechnik | |
| 506 | 0 | |a Open Access |2 star |f Unrestricted online access | |
| 520 | |a Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample's microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio - their fabrication by X-ray lithography with optimal structure quality is the topic of this work. | ||
| 540 | |a Creative Commons |f https://creativecommons.org/licenses/by-sa/4.0/ |2 cc |4 https://creativecommons.org/licenses/by-sa/4.0/ | ||
| 546 | |a English | ||
| 650 | 7 | |a Technology: general issues |2 bicssc | |
| 653 | |a Talbot effect | ||
| 653 | |a Röntgengitter | ||
| 653 | |a LIGA | ||
| 653 | |a X-ray optics | ||
| 653 | |a Phasenkontrast | ||
| 653 | |a Talbot-Effect | ||
| 653 | |a phase contrast | ||
| 653 | |a X-ray gratings | ||
| 653 | |a Röntgenoptik | ||
| 856 | 4 | 0 | |a www.oapen.org |u https://www.ksp.kit.edu/9783731506799 |7 0 |z DOAB: download the publication |
| 856 | 4 | 0 | |a www.oapen.org |u https://directory.doabooks.org/handle/20.500.12854/62856 |7 0 |z DOAB: description of the publication |