Advances in Unconventional Lithography

The term Lithography encompasses a range of contemporary technologies for micro and nano scale fabrication. Originally driven by the evolution of the semiconductor industry, lithography has grown from its optical origins to demonstrate increasingly fine resolution and to permeate fields as diverse a...

Full description

Saved in:
Bibliographic Details
Other Authors: Kostovski, Gorgi (Editor)
Format: Electronic Book Chapter
Language:English
Published: IntechOpen 2011
Subjects:
Online Access:DOAB: download the publication
DOAB: description of the publication
Tags: Add Tag
No Tags, Be the first to tag this record!

MARC

LEADER 00000naaaa2200000uu 4500
001 doab_20_500_12854_65285
005 20210420
003 oapen
006 m o d
007 cr|mn|---annan
008 20210420s2011 xx |||||o ||| 0|eng d
020 |a 1800 
020 |a 9789533076072 
020 |a 9789535155966 
040 |a oapen  |c oapen 
024 7 |a 10.5772/1800  |c doi 
041 0 |a eng 
042 |a dc 
072 7 |a PHFC  |2 bicssc 
100 1 |a Kostovski, Gorgi  |4 edt 
700 1 |a Kostovski, Gorgi  |4 oth 
245 1 0 |a Advances in Unconventional Lithography 
260 |b IntechOpen  |c 2011 
300 |a 1 electronic resource (200 p.) 
336 |a text  |b txt  |2 rdacontent 
337 |a computer  |b c  |2 rdamedia 
338 |a online resource  |b cr  |2 rdacarrier 
506 0 |a Open Access  |2 star  |f Unrestricted online access 
520 |a The term Lithography encompasses a range of contemporary technologies for micro and nano scale fabrication. Originally driven by the evolution of the semiconductor industry, lithography has grown from its optical origins to demonstrate increasingly fine resolution and to permeate fields as diverse as photonics and biology. Today, greater flexibility and affordability are demanded from lithography more than ever before. Diverse needs across many disciplines have produced a multitude of innovative new lithography techniques. This book, which is the final instalment in a series of three, provides a compelling overview of some of the recent advances in lithography, as recounted by the researchers themselves. Topics discussed include nanoimprinting for plasmonic biosensing, soft lithography for neurobiology and stem cell differentiation, colloidal substrates for two-tier self-assembled nanostructures, tuneable diffractive elements using photochromic polymers, and extreme-UV lithography. 
540 |a Creative Commons  |f https://creativecommons.org/licenses/by/3.0/  |2 cc  |4 https://creativecommons.org/licenses/by/3.0/ 
546 |a English 
650 7 |a Condensed matter physics (liquid state & solid state physics)  |2 bicssc 
653 |a Condensed matter physics (liquid state & solid state physics) 
856 4 0 |a www.oapen.org  |u https://mts.intechopen.com/storage/books/1330/authors_book/authors_book.pdf  |7 0  |z DOAB: download the publication 
856 4 0 |a www.oapen.org  |u https://directory.doabooks.org/handle/20.500.12854/65285  |7 0  |z DOAB: description of the publication