Advances in Unconventional Lithography

The term Lithography encompasses a range of contemporary technologies for micro and nano scale fabrication. Originally driven by the evolution of the semiconductor industry, lithography has grown from its optical origins to demonstrate increasingly fine resolution and to permeate fields as diverse a...

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Bibliografische gegevens
Andere auteurs: Kostovski, Gorgi (Redacteur)
Formaat: Elektronisch Hoofdstuk
Taal:Engels
Gepubliceerd in: IntechOpen 2011
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3rd Floor Main Library

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