Micromachining Techniques for Fabrication of Micro and Nano Structures

Micromachining is used to fabricate three-dimensional microstructures and it is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are two major categories (among others) in this field. This book presents advances in micromac...

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Bibliografski detalji
Daljnji autori: Kahrizi, Mojtaba (Urednik)
Format: Elektronički Poglavlje knjige
Jezik:engleski
Izdano: IntechOpen 2012
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