Takahata, K. (2013). Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies. IntechOpen.
Chicago Style (17. basım) AtıfTakahata, Kenichi. Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies. IntechOpen, 2013.
MLA (9th ed.) AtıfTakahata, Kenichi. Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies. IntechOpen, 2013.
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