Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies

• Outros Autores: Takahata, Kenichi (Editor)
• Formato: Recurso Electrónico Capítulo de Livro
• Idioma: inglês
• Publicado em: IntechOpen 2013
• Assuntos: Optical physics; Electricity, electromagnetism & magnetism
• Acesso em linha: DOAB: download the publication; DOAB: description of the publication

MEMS technology is increasingly penetrating into our lives and improving our quality of life. In parallel to this, advances in nanotechnology and nanomaterials have been catalyzing the rise of NEMS. Consisting of nine chapters reviewing state-of-the-art technologies and their future trends, this boo...