Updates in Advanced Lithography
Advanced lithography grows up to several fields such as nano-lithography, micro electro-mechanical system (MEMS) and nano-phonics, etc. Nano-lithography reaches to 20 nm size in advanced electron device. Consequently, we have to study and develop true single nanometer size lithography. One of the so...
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Format: | Electronic Book Chapter |
Language: | English |
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IntechOpen
2013
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Online Access: | DOAB: download the publication DOAB: description of the publication |
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520 | |a Advanced lithography grows up to several fields such as nano-lithography, micro electro-mechanical system (MEMS) and nano-phonics, etc. Nano-lithography reaches to 20 nm size in advanced electron device. Consequently, we have to study and develop true single nanometer size lithography. One of the solutions is to study a fusion of top down and bottom up technologies such as EB drawing and self-assembly with block copolymer. In MEMS and nano-photonics, 3 dimensional structures are needed to achieve some functions in the devices for the applications. Their formation are done by several methods such as colloid lithography, stereo-lithography, dry etching, sputtering, deposition, etc. This book covers a wide area regarding nano-lithography, nano structure and 3-dimensional structure, and introduces readers to the methods, methodology and its applications. | ||
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653 | |a Condensed matter physics (liquid state & solid state physics) | ||
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856 | 4 | 0 | |a www.oapen.org |u https://directory.doabooks.org/handle/20.500.12854/66578 |7 0 |z DOAB: description of the publication |