Micromachining
To present their work in the field of micromachining, researchers from distant parts of the world have joined their efforts and contributed their ideas according to their interest and engagement. Their articles will give you the opportunity to understand the concepts of micromachining of advanced ma...
Đã lưu trong:
| Tác giả khác: | , |
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| Định dạng: | Điện tử Chương của sách |
| Ngôn ngữ: | Tiếng Anh |
| Được phát hành: |
IntechOpen
2019
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| Những chủ đề: | |
| Truy cập trực tuyến: | DOAB: download the publication DOAB: description of the publication |
| Các nhãn: |
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| Tóm tắt: | To present their work in the field of micromachining, researchers from distant parts of the world have joined their efforts and contributed their ideas according to their interest and engagement. Their articles will give you the opportunity to understand the concepts of micromachining of advanced materials. Surface texturing using pico- and femto-second laser micromachining is presented, as well as the silicon-based micromachining process for flexible electronics. You can learn about the CMOS compatible wet bulk micromachining process for MEMS applications and the physical process and plasma parameters in a radio frequency hybrid plasma system for thin-film production with ion assistance. Last but not least, study on the specific coefficient in the micromachining process and multiscale simulation of influence of surface defects on nanoindentation using quasi-continuum method provides us with an insight in modelling and the simulation of micromachining processes. The editors hope that this book will allow both professionals and readers not involved in the immediate field to understand and enjoy the topic. |
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| Mô tả vật lý: | 1 electronic resource (172 p.) |
| số ISBN: | intechopen.75346 9781789238105 9781789238099 9781839627804 |
| Truy cập: | Open Access |