Manufacturing Metrology

Metrology is the science of measurement, which can be divided into three overlapping activities: (1) the definition of units of measurement, (2) the realization of units of measurement, and (3) the traceability of measurement units. Manufacturing metrology originally implicates the measurement of co...

Full description

Saved in:
Bibliographic Details
Other Authors: Fan, Kuang-Chao (Editor), Kinnell, Peter (Editor)
Format: Electronic Book Chapter
Language:English
Published: Basel MDPI - Multidisciplinary Digital Publishing Institute 2022
Subjects:
T
CMP
n/a
Online Access:DOAB: download the publication
DOAB: description of the publication
Tags: Add Tag
No Tags, Be the first to tag this record!

MARC

LEADER 00000naaaa2200000uu 4500
001 doab_20_500_12854_87414
005 20220706
003 oapen
006 m o d
007 cr|mn|---annan
008 20220706s2022 xx |||||o ||| 0|eng d
020 |a books978-3-0365-2987-5 
020 |a 9783036529868 
020 |a 9783036529875 
040 |a oapen  |c oapen 
024 7 |a 10.3390/books978-3-0365-2987-5  |c doi 
041 0 |a eng 
042 |a dc 
072 7 |a TB  |2 bicssc 
072 7 |a TBX  |2 bicssc 
100 1 |a Fan, Kuang-Chao  |4 edt 
700 1 |a Kinnell, Peter  |4 edt 
700 1 |a Fan, Kuang-Chao  |4 oth 
700 1 |a Kinnell, Peter  |4 oth 
245 1 0 |a Manufacturing Metrology 
260 |a Basel  |b MDPI - Multidisciplinary Digital Publishing Institute  |c 2022 
300 |a 1 electronic resource (414 p.) 
336 |a text  |b txt  |2 rdacontent 
337 |a computer  |b c  |2 rdamedia 
338 |a online resource  |b cr  |2 rdacarrier 
506 0 |a Open Access  |2 star  |f Unrestricted online access 
520 |a Metrology is the science of measurement, which can be divided into three overlapping activities: (1) the definition of units of measurement, (2) the realization of units of measurement, and (3) the traceability of measurement units. Manufacturing metrology originally implicates the measurement of components and inputs for a manufacturing process to assure they are within specification requirements. It can also be extended to indicate the performance measurement of manufacturing equipment. This Special Issue covers papers revealing novel measurement methodologies and instrumentations for manufacturing metrology from the conventional industry to the frontier of the advanced hi-tech industry. Twenty-five papers are included in this Special Issue. These published papers can be categorized into four main groups, as follows: Length measurement: covering new designs, from micro/nanogap measurement with laser triangulation sensors and laser interferometers to very-long-distance, newly developed mode-locked femtosecond lasers. Surface profile and form measurements: covering technologies with new confocal sensors and imagine sensors: in situ and on-machine measurements. Angle measurements: these include a new 2D precision level design, a review of angle measurement with mode-locked femtosecond lasers, and multi-axis machine tool squareness measurement. Other laboratory systems: these include a water cooling temperature control system and a computer-aided inspection framework for CMM performance evaluation. 
540 |a Creative Commons  |f https://creativecommons.org/licenses/by/4.0/  |2 cc  |4 https://creativecommons.org/licenses/by/4.0/ 
546 |a English 
650 7 |a Technology: general issues  |2 bicssc 
650 7 |a History of engineering & technology  |2 bicssc 
653 |a white light interference 
653 |a laser interference 
653 |a surface positioning 
653 |a end-plate surface distance measurement 
653 |a spherical diamond wheel 
653 |a diamond roller 
653 |a form truing 
653 |a in-situ measurements 
653 |a topography measurement 
653 |a differential measurement system 
653 |a modular design 
653 |a confocal sensor 
653 |a film interferometry 
653 |a over-constrained mechanism 
653 |a geometric deviations 
653 |a multi-tasking machine tools 
653 |a identification method 
653 |a squareness of translational axes 
653 |a metrology 
653 |a step gauge 
653 |a length calibration 
653 |a multi-path laser synthesis technology 
653 |a measurement mechanism 
653 |a machine tool 
653 |a surface shape contour 
653 |a on-site measurement 
653 |a positional relation 
653 |a scanless 3D imaging 
653 |a compressed sensing 
653 |a depth detection 
653 |a single-pixel detector 
653 |a blade tip timing 
653 |a circumferential Fourier fit 
653 |a synchronous vibration 
653 |a optical angle sensor 
653 |a mode-locked femtosecond laser 
653 |a optical frequency comb 
653 |a laser autocollimation 
653 |a diffraction grating 
653 |a absolute angle measurement 
653 |a nonlinear optics 
653 |a second harmonic generation 
653 |a aeroengine blade 
653 |a blade twist 
653 |a measurement and evaluation 
653 |a a priori planning 
653 |a geometric analysis 
653 |a automated optical inspection 
653 |a precision measurement 
653 |a circular contour 
653 |a edge detection 
653 |a measurement system analysis 
653 |a coordinate measuring machine 
653 |a reproducibility 
653 |a GD&amp 
653 |a T 
653 |a quality 
653 |a measurement uncertainty 
653 |a precision metrology 
653 |a form measurement 
653 |a stitching linear-scan method 
653 |a roundness measurement 
653 |a Monte Carlo method 
653 |a single point diamond tool 
653 |a cutting edge radius 
653 |a reversal method 
653 |a nanoindentation system 
653 |a elastic recovery 
653 |a surface charge distribution 
653 |a point probing characteristics 
653 |a spherical scattering electrical field probe 
653 |a miniature internal structures 
653 |a high aspect ratios 
653 |a circulating cooling water 
653 |a dynamic thermal filtering 
653 |a precision manufacturing 
653 |a quick response 
653 |a temperature stability 
653 |a thermal management 
653 |a dual-axis level 
653 |a light refraction 
653 |a light transmission 
653 |a angle measurement 
653 |a differential Fabry-Pérot interferometer 
653 |a homodyne interferometer 
653 |a nonlinearity error 
653 |a linear displacement 
653 |a chromatic confocal probe 
653 |a femtosecond laser 
653 |a off-axis differential method 
653 |a tracking local minimum method 
653 |a laser triangulation displacement sensor (LTDS) 
653 |a dispensing robot 
653 |a location system 
653 |a actual laser imaging waveform 
653 |a centroid difference 
653 |a repeatability accuracy 
653 |a dynamic response speed 
653 |a absolute distance measurement 
653 |a system error correction 
653 |a surface texture measurement 
653 |a confocal sensing 
653 |a surface form tracing 
653 |a 3D reconstruction 
653 |a roughness 
653 |a in-process 
653 |a metrology for machining 
653 |a optical coherence tomography 
653 |a wafer die 
653 |a defect detection 
653 |a generative adversarial network (GAN) 
653 |a you only look once version 3 (YOLOv3) 
653 |a pad dressing 
653 |a dynamic measurement 
653 |a CMP 
653 |a pad uniformity 
653 |a pad lifetime 
653 |a n/a 
856 4 0 |a www.oapen.org  |u https://mdpi.com/books/pdfview/book/5601  |7 0  |z DOAB: download the publication 
856 4 0 |a www.oapen.org  |u https://directory.doabooks.org/handle/20.500.12854/87414  |7 0  |z DOAB: description of the publication