Werkzeug- und Prozessentwicklung des Roll-to-Roll-Hochdurchsatzverfahrens zur kontinuierlichen, großflächigen Mikrostrukturierung
This work describes the set-up of a roll-to-roll (R2R) system and the development of a specific microstructuring process for a variety of different materials ranging from high-performance polymers and low-melting-point metals to glass nanocomposites and thermoplastic nonwovens, including a lithograp...
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| Format: | Electronic Book Chapter |
| Published: |
KIT Scientific Publishing
2022
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| Series: | Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie
43 |
| Subjects: | |
| Online Access: | OAPEN Library: download the publication OAPEN Library: description of the publication |
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| 245 | 1 | 0 | |a Werkzeug- und Prozessentwicklung des Roll-to-Roll-Hochdurchsatzverfahrens zur kontinuierlichen, großflächigen Mikrostrukturierung |
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| 520 | |a This work describes the set-up of a roll-to-roll (R2R) system and the development of a specific microstructuring process for a variety of different materials ranging from high-performance polymers and low-melting-point metals to glass nanocomposites and thermoplastic nonwovens, including a lithography and electroplating-based semi-automated tooling production for seamless R2R microreplication. | ||
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| 653 | |a Roll-to-Roll; Heißprägen; Mikrostruktur; Lithographie; Galvanik; roll-to-roll; thermal nanoimprint; microstructure; lithography; electroplating | ||
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