Simulations of thin film growth on patterned substrates
Patterned substrate growth is a technique that layers of thin film are grown on a substrate with a predetermined pattern. A simple model is used to study patterned growth process with two different types of pattern: flat pattern and periodic pattern. The goals are to determine growth conditions that...
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Chulalongkorn University,
2008-04-26T07:55:52Z.
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