Surface morphological, topological and crystallinity characteristics of sputtered barium strontium titanate thin films on sapphire substrates / F.W. Jamaluddin ... [et al.]

• Egile Nagusiak: Jamaluddin, F.W (Egilea), Abdul Khalid, M. F. (Egilea), Mahmood, M.K.A (Egilea), Mamat, M. H. (Egilea), Zoolfakar, A.S (Egilea)
• Formatua: Liburua
• Argitaratua: Universiti Teknologi MARA, 2019-12.
• Gaiak: Article; PeerReviewed
• Sarrera elektronikoa: Link Metadata

This paper presents the material characterization of barium strontium titanate (Ba0.5Sr0.5TiO3) thin films grown on sapphire substrates. The films were deposited by radio frequency (RF) magnetron sputtering system for 2, 3 and 4 hours on sapphire substrates, achieving film thicknesses of approximate...