Influence of corrugation size and location on sensitivity enhancement for MEMS-based pressure sensor / Seyed Farhan Moosavian ... [et al.]
In this paper, a MEMS capacitive diaphragm-based pressure sensor is investigated. The main focus of this work is to analyze the effect of the geometry and configuration on the sensitivity of a sensor as a crucial parameter in sensor design. Finite element modelling using ABAQUS software is conducted...
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| Main Authors: | , , , |
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| Format: | Book |
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Universiti Teknologi MARA,
2022-01.
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| Online Access: | Link Metadata |
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