Influence of corrugation size and location on sensitivity enhancement for MEMS-based pressure sensor / Seyed Farhan Moosavian ... [et al.]

• मुख्य लेखकों: Moosavian, Seyed Farhan (लेखक), Borzuei, Daryoosh (लेखक), Farajollahi, Meisam (लेखक), Goharzay, Mehrad (लेखक)
• स्वरूप: पुस्तक
• प्रकाशित: Universiti Teknologi MARA, 2022-01.
• विषय: Article; PeerReviewed
• ऑनलाइन पहुंच: Link Metadata

In this paper, a MEMS capacitive diaphragm-based pressure sensor is investigated. The main focus of this work is to analyze the effect of the geometry and configuration on the sensitivity of a sensor as a crucial parameter in sensor design. Finite element modelling using ABAQUS software is conducted...