Thickness and crystalline properties of sputtered polycrystalline silicon thin film deposited on Teflon substrates / Shaiful Bakhtiar Hashim, Norhidayatul Hikmee Mahzan and Sukreen Hana Herman

A Polycrystalline silicon (poly-Si) thin film was successfully deposited on Teflon substrates at a room temperature using radiofrequency (RF) magnetron sputtering. The effects of sputtering pressure on the thickness and crystallinity properties of the thin films have been studied. Raman scattering s...

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Príomhchruthaitheoirí: Hashim, Shaiful Bakhtiar (Údar), Mahzan, Norhidayatul Hikmee (Údar), Herman, Sukreen Hana (Údar)
Formáid: LEABHAR
Foilsithe / Cruthaithe: 2017.
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