Determination of the young's modulus of miniaturized cantilever by measuring micro- eflection using the phase-shift shadow moiré method / Lim Jiunn Hsuh, Mani Maran Ratnam, Ong Jiunn Chit and Chiang Ee Pin

• Автори: Lim, Jiunn Hsuh (Автор), Ratnam, Mani Maran (Автор), Ong, Jiunn Chit3 (Автор)
• Формат: Книга
• Опубліковано: Universiti Teknologi MARA, Pulau Pinang & Pusat Penerbitan Universiti (UPENA), 2013.
• Предмети: Article; NonPeerReviewed
• Онлайн доступ: Link Metadata

This paper presents a measurement for micro-deflection of miniaturized cantilever using phase-shift shadow moiré (PSSM) method and determines the Young's modulus of the cantilever material. The measurement equipment is calibrated by measuring and comparing the known surface profile of a cylind...