Search Results - "AlN thin film"

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  1. 1
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    Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices

    Published 2023
    Subjects: “…ScAlN thin film…”
    DOAB: download the publication
    DOAB: description of the publication
    Electronic Book Chapter

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  2. 2
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    Piezoelectric Transducers Materials, Devices and Applications

    Published 2020
    Subjects: “…AlN thin film…”
    DOAB: download the publication
    DOAB: description of the publication
    Electronic Book Chapter

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