Search Results - "Mikrosysteme"

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  1. 1
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    Modular adaptive mikrooptische Systeme in Kombination mit Mikroaktoren by Schüle, Sven

    Published 2010
    Subjects: “…LIGA-Mikrosysteme…”
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    Electronic Book Chapter

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  2. 2
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    Entwicklung von elektrochemisch abgeschiedenem LIGA-Ni-Al für Hochtemperatur-MEMS-Anwendungen by Teutsch, Michael

    Published 2013
    Subjects: “…Mikrosysteme…”
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  3. 3
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    Heißprägen von Verbundfolien für mikrofluidische Anwendungen by Kolew, Alexander

    Published 2012
    Subjects: “…Mikrosystem…”
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