Search Results - "wet etching"
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1
Silicon Nanodevices
Published 2022Subjects: “…selective wet etching…”
DOAB: download the publication
DOAB: description of the publication
Electronic Book Chapter -
2
MEMS/NEMS Sensors: Fabrication and Application
Published 2019Subjects: “…wet etching…”
DOAB: download the publication
DOAB: description of the publication
Electronic Book Chapter -
3
Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices
Published 2023Subjects: “…wet etch…”
DOAB: download the publication
DOAB: description of the publication
Electronic Book Chapter