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Nanoparticle Engineering for Chemical-Mechanical Planarization Fabrication of Next-Generation Nanodevices by Paik, Ungyu
Published 2009Other Authors: “…Park, Jea-Gun…”
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Nanoparticle Engineering for Chemical-Mechanical Planarization Fabrication of Next-Generation Nanodevices by Paik, Ungyu
Published 2009Other Authors: “…Park, Jea-Gun…”
OAPEN Library: download the publication
OAPEN Library: description of the publication
Electronic Book Chapter