Nanoparticle Engineering for Chemical-Mechanical Planarization Fabrication of Next-Generation Nanodevices

Increasing reliance on electronic devices demands products with high performance and efficiency. Such devices can be realized through the advent of nanoparticle technology. This book explains the physicochemical properties of nanoparticles according to each step in the chemical mechanical planarizat...

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Bibliografski detalji
Glavni autor: Paik, Ungyu (auth)
Daljnji autori: Park, Jea-Gun (auth)
Format: Elektronički Poglavlje knjige
Jezik:engleski
Izdano: Taylor & Francis 2009
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