Nanoparticle Engineering for Chemical-Mechanical Planarization Fabrication of Next-Generation Nanodevices
Increasing reliance on electronic devices demands products with high performance and efficiency. Such devices can be realized through the advent of nanoparticle technology. This book explains the physicochemical properties of nanoparticles according to each step in the chemical mechanical planarizat...
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| Format: | Elektronski Book Chapter |
| Jezik: | angleščina |
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Taylor & Francis
2009
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| Online dostop: | OAPEN Library: download the publication OAPEN Library: description of the publication |
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Internet
OAPEN Library: download the publicationOAPEN Library: description of the publication
3rd Floor Main Library
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A1234.567 |
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| Kopija 1 | Prosto |