Statistical optimization influence on high permittivity gate spacer in 16nm DG-FinFET device / Ameer F. Rosla ... [et al.] by Rosla, Ameer F., Salehuddin, F., Zain, A.S.M, Kaharudin, K.E, Mohamad, N.R, A.H, Afifah Maheran, Haroon, H., Razak, H.A, Idris, S.K, Ahmad, I.

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