Search Results - Takahata, Kenichi

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  1. 1
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    Micro Electronic and Mechanical Systems

    Published 2009
    Other Authors: “…Takahata, Kenichi…”
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  2. 2
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    Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies

    Published 2013
    Other Authors: “…Takahata, Kenichi…”
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