Introduction to Vacuum Technology

• Asıl Yazarlar: Hata, David M. (Yazar), Brewer, Elena V. (Yazar), Louwagie, Nancy J. (Yazar)
• Materyal Türü: Elektronik Ekitap
• Dil: İngilizce
• Baskı/Yayın Bilgisi: Geneseo, NY Milne Open Textbooks 2023.
• Seri Bilgileri: Open textbook library.
• Konular: Engineering and Technology > Textbooks; Electrical Engineering > Textbooks
• Online Erişim: Access online version

Vacuum systems are critical to many industries. They are vital to establishing required process pressures, establishing a clean process environment, and removing reaction by-products from the process chamber. This text, a revision and expansion of David Hata’s Introduction to Vacuum Technology publi...