Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices

Recently, aluminium scandium nitride (AlScN) emerged as a material with superior properties compared to aluminium nitride (AlN). Substituting Al with Sc in AlN leads to a dramatic increase in the piezoelectric coefficient as well as in electromechanical coupling. This discovery finally allowed us to...

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Andere auteurs: Žukauskaitė, Agnė (Redacteur)
Formaat: Elektronisch Hoofdstuk
Taal:Engels
Gepubliceerd in: Basel MDPI - Multidisciplinary Digital Publishing Institute 2023
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