Abbildende Ellipsometrie mit Lichtwegumkehrung für die optische Charakterisierung von gekrümmten Oberflächen
Ellipsometry is a measuring method for surface characterization and thin-film measurement of flat surfaces using polarized light. However, a new measuring principle based on return-path ellipsometry and retroreflection enables the detection of free-form surfaces. This new measurement principle and r...
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Main Author: | |
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Format: | Electronic Book Chapter |
Published: |
KIT Scientific Publishing
2023
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Series: | Schriftenreihe Automatische Sichtprüfung und Bildverarbeitung
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Subjects: | |
Online Access: | DOAB: download the publication DOAB: description of the publication |
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Internet
DOAB: download the publicationDOAB: description of the publication
3rd Floor Main Library
Call Number: |
A1234.567 |
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Copy 1 | Available |