Ion Implantation

Ion implantation presents a continuously evolving technology. While the benefits of ion implantation are well recognized for many commercial endeavors, there have been recent developments in this field. Improvements in equipment, understanding of beam-solid interactions, applications to new material...

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Bibliographic Details
Other Authors: Goorsky, Mark (Editor)
Format: Electronic Book Chapter
Language:English
Published: IntechOpen 2012
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3rd Floor Main Library

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Call Number: A1234.567
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