Ion Implantation

• Autres auteurs: Goorsky, Mark (Éditeur intellectuel)
• Format: Électronique Chapitre de livre
• Langue: anglais
• Publié: IntechOpen 2012
• Sujets: Engineering thermodynamics; Materials science
• Accès en ligne: DOAB: download the publication; DOAB: description of the publication

Ion implantation presents a continuously evolving technology. While the benefits of ion implantation are well recognized for many commercial endeavors, there have been recent developments in this field. Improvements in equipment, understanding of beam-solid interactions, applications to new material...