MEMS Sensors Design and Application

MEMS by becoming a part of various applications ranging from smartphones to automobiles has become an integral part of our everyday life. MEMS is building synergy between previously unrelated fields such as biology, microelectronics and communications, to improve the quality of human life. The senso...

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Bibliographic Details
Other Authors: Yellampalli, Siva (Editor)
Format: Electronic Book Chapter
Language:English
Published: IntechOpen 2018
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