Chemical Vapor Deposition for Nanotechnology
Chemical vapor deposition (CVD) techniques have played a major role in the development of modern technology, and the rise of nanotechnology has further increased their importance, thanks to techniques such as atomic layer deposition (ALD) and vapor liquid solid growth, which are able to control the...
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| Format: | Electronic Book Chapter |
| Language: | English |
| Published: |
IntechOpen
2019
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| Subjects: | |
| Online Access: | DOAB: download the publication DOAB: description of the publication |
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