Nanoparticle Engineering for Chemical-Mechanical Planarization Fabrication of Next-Generation Nanodevices
Increasing reliance on electronic devices demands products with high performance and efficiency. Such devices can be realized through the advent of nanoparticle technology. This book explains the physicochemical properties of nanoparticles according to each step in the chemical mechanical planarizat...
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| Andere auteurs: | |
| Formaat: | Elektronisch Hoofdstuk |
| Taal: | Engels |
| Gepubliceerd in: |
Taylor & Francis
2009
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| Onderwerpen: | |
| Online toegang: | DOAB: download the publication DOAB: description of the publication |
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Internet
DOAB: download the publicationDOAB: description of the publication
3rd Floor Main Library
| Plaatsingsnummer: |
A1234.567 |
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| Kopie 1 | Beschikbaar |