Development of CMOS-MEMS/NEMS Devices

• Main Author: Verd, Jaume (auth)
• Other Authors: Segura, Jaume (auth)
• Format: Electronic Book Chapter
• Language: English
• Published: MDPI - Multidisciplinary Digital Publishing Institute 2019
• Subjects: History of engineering & technology; encapsulation; n/a; NEM memory switch; magnetotransistor; gas sensor; nano-system array; metal oxide (MOX) sensor; capacitive pressure sensor; real-time temperature compensation loop; mechanical relays; single-crystal silicon (SC-Si); MEMS relays; MEMS; oscillator; micro-electro-mechanical system (MEMS); uncooled IR-bolometer; microelectromechanical systems; microbolometer; programmable sustaining amplifier; micro sensor; CMOS-MEMS; pierce oscillator; MEMS resonators; micro/nanoelectromechanical systems (MEMS/NEMS); resonator; microhotplate; NEMS; application-specific integrated circuit (ASIC); MEMS modelling; magnetic field; chopper instrumentation amplifier; microresonators; interface circuit; Hall effect; thermal detector; temperature sensor; infrared sensor; CMOS-NEMS; CMOS; atomic force microscope; MEMS switches; stent; micro-electro-mechanical systems (MEMS) sensors; nano resonator; silicon-on-insulator (SOI); MEMS-ASIC integration; Sigma-Delta; MEMS characterization; high-Q capacitive accelerometer; mass sensors; M3D
• Online Access: DOAB: download the publication; DOAB: description of the publication

Micro and nano-electro-mechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within Integrated Circuits (ICs) in the More-Than-Moore era, as described in the International Technology Roadmap for Semiconductors. The CMOS ICs and...