Development of CMOS-MEMS/NEMS Devices
Micro and nano-electro-mechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within Integrated Circuits (ICs) in the More-Than-Moore era, as described in the International Technology Roadmap for Semiconductors. The CMOS ICs and...
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Formato: | Recurso Electrónico Capítulo de Livro |
Idioma: | inglês |
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MDPI - Multidisciplinary Digital Publishing Institute
2019
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Acesso em linha: | DOAB: download the publication DOAB: description of the publication |
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