Entwicklung eines maskenlosen Fotolithographiesystems zum Einsatz im Rapid Prototyping in der Mikrofluidik und zur gezielten Oberflächenfunktionalisierung
In this work, a maskless lithography device based on a micro-mirror array was designed and built. Single projection frames are seamlessly projected next to each other. Microfluidic chips of several cm² size comprising channels of 50 µm have been built of various polymers via direct lithography and c...
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| Auteur principal: | |
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| Format: | Électronique Chapitre de livre |
| Publié: |
KIT Scientific Publishing
2013
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| Collection: | Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie / Hrsg.: Institut für Mikrostrukturtechnik
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| Sujets: | |
| Accès en ligne: | DOAB: download the publication DOAB: description of the publication |
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| Résumé: | In this work, a maskless lithography device based on a micro-mirror array was designed and built. Single projection frames are seamlessly projected next to each other. Microfluidic chips of several cm² size comprising channels of 50 µm have been built of various polymers via direct lithography and casting. Also, bio-chemical ligand patterns comprising 256 different ligand densities have been created in a few seconds on a 5 mm² substrate with pixel sizes of a few µm. |
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| Description matérielle: | 1 electronic resource (XVI, 133 p. p.) |
| ISBN: | KSP/1000036845 9783731501190 |
| Accès: | Open Access |