Entwicklung eines maskenlosen Fotolithographiesystems zum Einsatz im Rapid Prototyping in der Mikrofluidik und zur gezielten Oberflächenfunktionalisierung
In this work, a maskless lithography device based on a micro-mirror array was designed and built. Single projection frames are seamlessly projected next to each other. Microfluidic chips of several cm² size comprising channels of 50 µm have been built of various polymers via direct lithography and c...
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Format: | Electronic Book Chapter |
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KIT Scientific Publishing
2013
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Series: | Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie / Hrsg.: Institut für Mikrostrukturtechnik
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Online Access: | DOAB: download the publication DOAB: description of the publication |
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100 | 1 | |a Waldbaur, Ansgar |4 auth | |
245 | 1 | 0 | |a Entwicklung eines maskenlosen Fotolithographiesystems zum Einsatz im Rapid Prototyping in der Mikrofluidik und zur gezielten Oberflächenfunktionalisierung |
260 | |b KIT Scientific Publishing |c 2013 | ||
300 | |a 1 electronic resource (XVI, 133 p. p.) | ||
336 | |a text |b txt |2 rdacontent | ||
337 | |a computer |b c |2 rdamedia | ||
338 | |a online resource |b cr |2 rdacarrier | ||
490 | 1 | |a Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie / Hrsg.: Institut für Mikrostrukturtechnik | |
506 | 0 | |a Open Access |2 star |f Unrestricted online access | |
520 | |a In this work, a maskless lithography device based on a micro-mirror array was designed and built. Single projection frames are seamlessly projected next to each other. Microfluidic chips of several cm² size comprising channels of 50 µm have been built of various polymers via direct lithography and casting. Also, bio-chemical ligand patterns comprising 256 different ligand densities have been created in a few seconds on a 5 mm² substrate with pixel sizes of a few µm. | ||
540 | |a Creative Commons |f https://creativecommons.org/licenses/by-sa/4.0/ |2 cc |4 https://creativecommons.org/licenses/by-sa/4.0/ | ||
546 | |a German | ||
650 | 7 | |a Technology: general issues |2 bicssc | |
653 | |a Mikrofluidikchip | ||
653 | |a Rapid Prototyping | ||
653 | |a Mikrospiegelarray | ||
653 | |a Ligandenmuster | ||
653 | |a Lithographie | ||
856 | 4 | 0 | |a www.oapen.org |u https://www.ksp.kit.edu/9783731501190 |7 0 |z DOAB: download the publication |
856 | 4 | 0 | |a www.oapen.org |u https://directory.doabooks.org/handle/20.500.12854/46578 |7 0 |z DOAB: description of the publication |