Entwicklung eines maskenlosen Fotolithographiesystems zum Einsatz im Rapid Prototyping in der Mikrofluidik und zur gezielten Oberflächenfunktionalisierung

• Yazar: Waldbaur, Ansgar (auth)
• Materyal Türü: Elektronik Kitap Bölümü
• Baskı/Yayın Bilgisi: KIT Scientific Publishing 2013
• Seri Bilgileri: Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie / Hrsg.: Institut für Mikrostrukturtechnik
• Konular: Technology: general issues; Mikrofluidikchip; Rapid Prototyping; Mikrospiegelarray; Ligandenmuster; Lithographie
• Online Erişim: DOAB: download the publication; DOAB: description of the publication

In this work, a maskless lithography device based on a micro-mirror array was designed and built. Single projection frames are seamlessly projected next to each other. Microfluidic chips of several cm² size comprising channels of 50 µm have been built of various polymers via direct lithography and c...