Entwicklung eines maskenlosen Fotolithographiesystems zum Einsatz im Rapid Prototyping in der Mikrofluidik und zur gezielten Oberflächenfunktionalisierung
In this work, a maskless lithography device based on a micro-mirror array was designed and built. Single projection frames are seamlessly projected next to each other. Microfluidic chips of several cm² size comprising channels of 50 µm have been built of various polymers via direct lithography and c...
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Main Author: | Waldbaur, Ansgar (auth) |
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Format: | Electronic Book Chapter |
Published: |
KIT Scientific Publishing
2013
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Series: | Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie / Hrsg.: Institut für Mikrostrukturtechnik
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Subjects: | |
Online Access: | DOAB: download the publication DOAB: description of the publication |
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