Entwicklung eines Röntgenmikroskops für Photonenenergien von 15 keV bis 30 keV

In many research areas X-rays are used for analysis. In X-ray full field microscopy a high resolution is achievable independent of the source properties by using imaging lenses. With an objective lens with 100 mm focal length a theoretical resolution of 60nm is achievable at 30 keV. In Experiments a...

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Bibliographic Details
Main Author: Marschall, Felix (auth)
Format: Electronic Book Chapter
Published: KIT Scientific Publishing 2014
Series:Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie / Hrsg.: Institut für Mikrostrukturtechnik
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Online Access:DOAB: download the publication
DOAB: description of the publication
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245 1 0 |a Entwicklung eines Röntgenmikroskops für Photonenenergien von 15 keV bis 30 keV 
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520 |a In many research areas X-rays are used for analysis. In X-ray full field microscopy a high resolution is achievable independent of the source properties by using imaging lenses. With an objective lens with 100 mm focal length a theoretical resolution of 60nm is achievable at 30 keV. In Experiments a resolution of 200 nm for a field of view of 80 µm 
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650 7 |a Technology: general issues  |2 bicssc 
653 |a Röntgenmikroskopie 
653 |a OptikX-ray microscopy 
653 |a Vollfeldmikroskopie 
653 |a Mikrostrukturtechnik 
653 |a refraktive Linse 
653 |a full-field-microscopy 
653 |a refractive lens 
653 |a optics 
653 |a microstructure technology 
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