Gas Flows in Microsystems

• Main Author: Baldas, Lucien (auth)
• Other Authors: Colin, Stéphane (auth)
• Format: Electronic Book Chapter
• Language: English
• Published: MDPI - Multidisciplinary Digital Publishing Institute 2019
• Subjects: Technology: general issues; preconcentrator; UV absorption; n/a; bearing characteristics; ultraviolet light-emitting diode (UV LED); resonant micro-electromechanical-systems (MEMS); heat sinks; measurement and control; flow choking; mixing length; gas flows in micro scale; BTEX; kinetic theory; PID detector; ethylbenzene and xylene (BTEX); computational fluid dynamics (CFD); OpenFOAM; direct simulation Monte Carlo (DSMC); thermally induced flow; vacuum micropump; miniaturization; gaseous rarefaction effects; modelling; volatile organic compound (VOC) detection; supersonic microjets; slip flow; Nano-Electro-Mechanical Systems (NEMS); micro-mirrors; micro-scale flows; microfabrication; Knudsen pump; microfluidic; microfluidics; hollow core waveguides; capillary tubes; gas mixing; advanced measurement technologies; DSMC; Micro-Electro-Mechanical Systems (MEMS); microchannels; miniaturized gas chromatograph; Pitot tube; multi-stage micromixer; analytical solution; pressure drop; micro-mixer; thermal transpiration; photoionization detector; FE analysis; gas mixtures; spectrophotometry; Knudsen layer; pulsed flow; Fanno flow; integrated micro sensors; binary gas mixing; modified Reynolds equation; rarefied gas flow; rarefied gas flows; backward facing step; modular micromixer; fractal surface topography; underexpansion; electronic cooling; splitter; compressibility; photolithography; Benzene; out-of-plane comb actuation; gas sensors; aerodynamic effect; fluid damping; toluene; control mixture composition
• Online Access: DOAB: download the publication; DOAB: description of the publication

The last two decades have witnessed a rapid development of microelectromechanical systems (MEMS) involving gas microflows in various technical fields. Gas microflows can, for example, be observed in microheat exchangers designed for chemical applications or for cooling of electronic components, in f...