Laser-Based Nano Fabrication and Nano Lithography

The improvement of fabrication resolutions is an eternal challenge for miniaturizing and enhancing the integration degrees of devices. Laser processing is one of the most widely used techniques in manufacturing due to its high flexibility, high speed, and environmental friendliness. The fabrication...

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Bibliographic Details
Main Author: Koji Sugioka (Ed.) (auth)
Other Authors: Ya Cheng (Ed.) (auth)
Format: Electronic Book Chapter
Language:English
Published: MDPI - Multidisciplinary Digital Publishing Institute 2018
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