Laser-Based Nano Fabrication and Nano Lithography

• Main Author: Koji Sugioka (Ed.) (auth)
• Other Authors: Ya Cheng (Ed.) (auth)
• Format: Electronic Book Chapter
• Language: English
• Published: MDPI - Multidisciplinary Digital Publishing Institute 2018
• Subjects: Chemistry; Laser processing; Nano fabrication; 3D fabrication; Nano material synthesis; Nano ripple formation
• Online Access: DOAB: download the publication; DOAB: description of the publication

The improvement of fabrication resolutions is an eternal challenge for miniaturizing and enhancing the integration degrees of devices. Laser processing is one of the most widely used techniques in manufacturing due to its high flexibility, high speed, and environmental friendliness. The fabrication...